JPH0481047U - - Google Patents
Info
- Publication number
- JPH0481047U JPH0481047U JP12482290U JP12482290U JPH0481047U JP H0481047 U JPH0481047 U JP H0481047U JP 12482290 U JP12482290 U JP 12482290U JP 12482290 U JP12482290 U JP 12482290U JP H0481047 U JPH0481047 U JP H0481047U
- Authority
- JP
- Japan
- Prior art keywords
- ozone
- detection element
- shows
- decomposition
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 7
- 238000000354 decomposition reaction Methods 0.000 claims description 5
- 238000005979 thermal decomposition reaction Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12482290U JPH0481047U (en]) | 1990-11-26 | 1990-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12482290U JPH0481047U (en]) | 1990-11-26 | 1990-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0481047U true JPH0481047U (en]) | 1992-07-15 |
Family
ID=31872452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12482290U Pending JPH0481047U (en]) | 1990-11-26 | 1990-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0481047U (en]) |
-
1990
- 1990-11-26 JP JP12482290U patent/JPH0481047U/ja active Pending
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